Mks Astron 2l Manual 💯 Best

The MKS ASTeX ASTRON 2L is a remote plasma source (RPS) primarily used as an atomic fluorine generator for semiconductor manufacturing processes like chamber cleaning and etching.

• Pin 1: Filament (Return)
• Pin 2: Filament (Drive)
• Pin 3: Grid/Anode
• Pin 5: Collector (Ion current)
• Pin 8: Shield/Ground
• Pin 9: Cable shield drain wire

Procedure:

1. Allow the controller to warm up for 1 hour.
2. Apply a known accurate pressure (e.g., 1.0 x 10⁻⁶ Torr from a calibration standard).
3. Locate the SPAN potentiometer on the front panel (under a small plastic cap).
4. Adjust the meter needle to match the known pressure.
5. For zero adjustment (below 1 x 10⁻⁹ Torr), adjust the ZERO trimpot on the rear panel with the filament off.

Maintenance: Standard maintenance involves monitoring output voltage at zero pressure. Never attempt to clean the internal sensor, as this voids the warranty and can destroy the unit's calibration.  mks astron 2l manual

Avoid aluminum if possible, as it has a higher recombination probability ( The MKS ASTeX ASTRON 2L is a remote